Fabrication of beam structures with micro-scale cross-sections and meso-scale spans
نویسندگان
چکیده
To allow testing of micro-scale aerodynamics, a process was created to manufacture beam structures that combine spans of 1 cm with a cross-section of 5 μm by 100 μm. The structural considerations limiting the fabrication of a structure combining macro-scale spans with a micro-scale cross-section are analyzed. Limiting considerations include forces during operation, fluid forces during release, vibrational limitations and beam buckling. Based on these results, a fabrication process for creating a beam structure for large spans without support structures is devised, incorporating the use of back-side etches and extra handling wafers to avoid stiction. This process is used to successfully fabricate the desired structure. (Some figures in this article are in colour only in the electronic version)
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